CIQ CIQ pneumatic valve pneumatic UHV ultra high vacuum valve for switching on or off the airflow in vacuum. Butterfly valve operation is completed after two butterfly door closed or open process, there is no positive and negative sides of the valve mounting direction, the valve pressure range can be broadened to 2x105-1.3-7x10Pa. Applicable medium can be pure air or corrosive gases. Main technical performance Scope: 2x105 ~ 6.7-7x10Pa valve leak rate: ≤1.3x10-7 Pa.L / S (positive and negative) Temperature: -30 ~ + 150 ℃ installation status: any mounting orientation: Open any pressure : 2x105Pa opening angle:. 0-90 ° opening and closing time: 3S main parts materials Body, butterfly doors, stem: stainless steel Seals: Viton, bellows (seal) Overall and connection dimensions (mm) (GB6070) Model DN (mm) D Do D1 BH B1 n-Mc CIQ-63 63 130 110 68 40 235 62 4-M8 CIQ-80 80 145 125 85 40 240 62 8-M8 CIQ-100 100 165 145 105 40 240 62 8 -M8 CIQ-160 160 225 200 165 56 310 75 8-M10 CIQ-200 200 285 260 208 70 360 75 12-M10 CIQ-250 250 335 310 258 74 396 75 12-M10 CIQ-320 320 425 395 328 94 488 94 12-M12 CIQ-400 400 510 480 410 106 538 114 16-M12